Method for operating an optical component, and optical component

Abstract

The invention relates to a method for operating an optical component having a mirror element, a substrate for carrying the mirror element, an actuator device for tilting the mirror element about one or two tilt axes, which actuator device has a first actuator electrode structure and a second actuator electrode structure, and a sensor device for detecting a tilt angle of the mirror element. The first actuator electrode structure in this case comprises a plurality of first active actuator electrodes and at least one first passive actuator electrode. The second actuator electrode structure in this case comprises a plurality of second active actuator electrodes and at least one second passive actuator electrode. At least one of the first active actuator electrodes is subjected to a first voltage and at least one of the second active actuator electrodes is subjected to a second voltage. In order to tilt the mirror element, the first and the second voltage are changed with different rates of change.

Dependencies are inferred from the claim text.