Manufacturing method of single crystals
AssigneeSumco Corporation
InventorsYasunobu Shimizu, Susumu Tamaoki, Ippei Shimozaki, Keiichi Takanashi, Ken Hamada
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AssigneeSumco Corporation
InventorsYasunobu Shimizu, Susumu Tamaoki, Ippei Shimozaki, Keiichi Takanashi, Ken Hamada
Estimating the term…
Provided is a process of measuring a space between a melt surface and a seed crystal provided above a melt, a process of lowering the seed crystal based on the space and bringing the seed crystal into contact with the melt, and a process of growing a single crystal by pulling the seed crystal while maintaining contact with the melt. Images of the seed crystal and the melt surface are captured by a camera installed diagonally above the melt surface, a real-image edge approximation circle is generated by approximating a circle from an edge pattern at a lower end of a straight-trunk portion of a real image of the seed crystal, and a mirror-image edge approximation circle is generated by approximating the circle from an edge pattern at the straight-trunk portion of a mirror image of the seed crystal reflected on the melt surface.
A manufacturing method of a single crystal by the Czochralski method, comprising:
Dependencies are inferred from the claim text.