Pre-wet module

A pre-wet module comprising:

• a stage configured to hold a back surface of a substrate with a surface to be processed facing upward;
• a rotation mechanism configured to rotate the stage;
• a cleaning liquid supply member having a nozzle arranged above the stage, the cleaning liquid supply member being configured to supply a cleaning liquid in a direction of the stage via the nozzle;
• a deaerated liquid supply member configured to supply a deaerated liquid to a surface to be processed of a substrate held onto the stage, the deaerated liquid supply member being configured to be movable between a supply position and a retracted position, the supply position being located between the nozzle and the surface to be processed of the substrate, and the retracted position being retracted from between the nozzle and the surface to be processed of the substrate,
• a substrate station configured to hold a substrate with a surface to be processed facing upward at a cleaning position between the deaerated liquid supply member arranged at the supply position and the nozzle and move up and down in order to grip or release a substrate from or to the stage;
• and
• a shutter member configured to block and open a path for the substrate station to move up and down.