Inspection apparatus and method of inspecting display substrate using the same
AssigneeSamsung Display Co., Ltd.
InventorsMyoungchul Kim, Taejun Kim, Tae-Gu Kang, Gunyoung Park, Jihoon Seo, Moonsung Choi
Life of this patent
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AssigneeSamsung Display Co., Ltd.
InventorsMyoungchul Kim, Taejun Kim, Tae-Gu Kang, Gunyoung Park, Jihoon Seo, Moonsung Choi
Estimating the term…
An inspection apparatus includes: a stage on which a display substrate having a plurality of cell regions and a boundary region adjacent to the plurality of cell regions is seated and a plurality of photographing units which photograph the display substrate. The plurality of photographing units may include a first photographing unit which photographs a first photographing region of the display substrate and a second photographing unit which photographs a second photographing region adjacent to the first photographing region of the display substrate, the first photographing unit is capable of independently adjusting the first photographing region and the second photographing units is capable of independently adjusting the second photographing region, and a boundary of the first photographing region and a boundary of the second photographing region overlap the boundary region in a plan view.
An inspection apparatus comprising:
A method of inspecting a display substrate, the method comprising:
Dependencies are inferred from the claim text.