Component of an optical system
AssigneeCarl Zeiss SMT GmbH
InventorsMatthias Kestel, Matthias Mueller, Roland Gischa, Philipp Weishaupt, Thomas Stuebler
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AssigneeCarl Zeiss SMT GmbH
InventorsMatthias Kestel, Matthias Mueller, Roland Gischa, Philipp Weishaupt, Thomas Stuebler
Estimating the term…
A component of an optical system comprises an optical element and a first channel system outside the optical element and through which a cooling fluid can flow, such that, during operation of the optical system, heat generated by electromagnetic radiation incident on the optical element is absorbed and drawn off via the cooling fluid in the first channel system. The component also includes a second channel system through which a cooling fluid can flow to at least partially thermally shield a region of the component from the heat absorbed by the cooling fluid in the first channel system. The second channel system is outside the first channel system in the radial direction relative to the center of the optical element.
An assembly, comprising:
Dependencies are inferred from the claim text.