Nanocomposite-seeded epitaxial growth of single-domain lithium niobate thin films for surface acoustic wave devices
AssigneesPurdue Research Foundation, National Technology & Engineering Solutions of Sandia, LLC
InventorsHaiyan Wang, Robynn-Lynne Paldi, Aleem Siddiqui
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Abstract
A method for making LNO film, including the steps of identifying a substrate, identifying a deposition target, placing the substrate and deposition target in a deposition environment, evolving target material into the deposition environment, and depositing evolved target material onto the substrate to yield an LNO film. The deposition environment defines a temperature of between 500 degrees Celsius and 750 degrees Celsius and a pressure of about 10−6 Torr. A seed or buffer layer may be first deposited onto the substrate, wherein the seed layer is about 30 mole percent gold and about 70 LiNbO3.
Claims13
A LNO film, comprising:
- a single crystal-like LNO film;
- a substrate;
- and
- a seed layer between the substrate and the single crystal-like LNO film;
- wherein the single crystal-like LNO film has a single domain;
- wherein the single crystal-like LNO film is between 100 nm and 5 μm thick;
- and
- wherein the single crystal-like LNO film is at least 80 cm2 in area;
- wherein the seed layer is 70 mole percent LiNbO3 and 30 mole percent metal;
- wherein the metal is selected from the group consisting of Au, Ag, Ni, Co, Cu, and combinations thereof.
A LNO film, comprising:
- a single domain LNO film;
- a substrate;
- and
- a seed layer between the substrate and the single domain LNO film;
- wherein the seed layer is 70 mole percent LiNbO3 and 30 mole percent Au;
- wherein the seed layer is between 10 nm and 50 nm thick.
A LNO film, comprising:
- a single crystal-like LNO film;
- a substrate;
- and
- a seed layer between the substrate and the single crystal-like LNO film;
- wherein the single crystal-like LNO film has a single domain;
- wherein the single crystal-like LNO film is between 100 nm and 5 μm thick;
- wherein the seed layer comprises LiNbO3 and a metal selected from the group consisting of Au, Ag, Ni, Co, Cu, and combinations thereof.
Dependencies are inferred from the claim text.