Conductive polymer composition, coated product, and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakayuki Nagasawa, Jun Hatakeyama
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakayuki Nagasawa, Jun Hatakeyama
Estimating the term…
A conductive polymer composition containing: (A) a polyaniline-based conductive polymer having a repeating unit represented by following general formula (1); and (B) polymer having structure represented by following general formula (2). In formulae, each of R1 to R4 represents hydrogen atom, acidic group, hydroxy group, alkoxy group, carboxy group, nitro group, halogen atom, or hydrocarbon group, R5 and R6 each independently represent a hydrogen atom, linear, branched, or cyclic alkyl group having 1-10 carbon atoms or a hydrocarbon group containing a hetero atom, Xa- represents anion, and “a” represents valence. The conductive polymer composition has good filterability and film-formability of flat film on electron beam resist and can be used suitably for antistatic film for electron beam resist writing showing excellent antistatic property in electron beam writing process, and, reducing effect of acid diffused from film to minimum, and also having excellent peelability.
A conductive polymer composition for an antistatic film for electron beam resist writing,
Dependencies are inferred from the claim text.