Magnetic suspension device and semiconductor processing apparatus

A semiconductor processing equipment, comprising a magnetic levitation device, the magnetic levitation device comprising:

• a rotor;
• and
• a stator, wherein the stator surrounds the rotor, or, the rotor surrounds the stator,
• wherein:
• the stator comprises at least three magnetic stator substrates, a permanent magnet and a guiding magnet, the at least three magnetic stator substrates are spaced apart from each other in an axial direction of the stator to define at least two gaps in the axial direction of the stator, the permanent magnet and the guiding magnet are alternately arranged in the at least two gaps in the axial direction of the stator;
• each of the at least three magnetic stator substrates comprises a substrate body and a protrusion connected with the substrate body, the protrusion is protruded from the permanent magnet and the guiding magnet towards the rotor, and a magnetic levitation coil is wound on the protrusion;
• and
• the at least three magnetic stator substrates comprise a first magnetic stator substrate, wherein a protrusion and a magnetic levitation coil of the first magnetic stator substrate apply an upward force along the axial direction of the stator on the rotor, and a ratio of the number of the first magnetic stator substrate(s) to the total number of the at least three magnetic stator substrates is greater than or equal to 50%,
• wherein each of the at least three magnetic stator substrates comprise a plurality of the protrusions, the number of the first magnetic stator substrate(s) is at least two.