Constant-temperature liquid supply apparatus

A constant-temperature liquid supply apparatus for supplying liquid from a liquid supply source to a processing apparatus while adjusting the liquid to a constant temperature, the constant-temperature liquid supply apparatus comprising:

• a housing;
• an inlet disposed in the housing such that the liquid is allowed to flow from the liquid supply source into the housing;
• an outlet disposed in the housing such that the liquid is allowed to flow out of the housing to the processing machine;
• a circulation route for circulating the liquid between the inlet and the outlet;
• a tank that is disposed in the circulation route and accommodates the liquid flowing in through the inlet;
• a pump that is disposed adjacent to the tank in the circulation route and discharges the liquid accommodated in the tank;
• a temperature adjusting unit that is disposed in the circulation route and adjusts a temperature of the liquid;
• an outflow quantity measuring section that measures an outflow quantity of the liquid flowing out through the outlet;
• an on-off valve that is disposed in the circulation route and controls whether the liquid should be circulated in the circulation route;
• and
• a controller that controls at least the pump and the temperature adjusting unit,
• wherein the controller has a first determination section that determines switching from a normal mode of supplying the liquid to the processing apparatus to a stand-by mode of circulating the liquid in the circulation route by controlling the on-off valve, when it is determined that the outflow quantity of the liquid measured by the outflow quantity measuring section is zero, and,
• in the stand-by mode, the discharge quantity from the pump is set to be smaller than that in the normal mode to thereby lower the power consumption of the pump.