Evaporation source for vacuum evaporation apparatus
AssigneeUlvac, Inc.
InventorsTakahito Kimoto, Masashi Yasuda, Toshiharu Kurauchi, Shunsuke Sasaki
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AssigneeUlvac, Inc.
InventorsTakahito Kimoto, Masashi Yasuda, Toshiharu Kurauchi, Shunsuke Sasaki
Estimating the term…
An evaporation source for use in a vacuum evaporation apparatus is provided with: an evaporation boat inclusive of a boat main body with a containing part for an evaporation material, and electrode mounting plate parts respectively extending outward from both ends of the boat main body; and material feeding means for feeding a wire-shaped evaporation material into the containing part from an upper side thereof. By charging electric current across both electrode mounting plate parts, the boat main body is heated to evaporate the evaporation material inside the containing part. A supporting means is disposed in contact, from underneath, with such a bottom plate part of the boat main body as defines the containing part. The supporting means has supporting plates disposed in a state in which upper ends of the supporting plates are in contact, from underneath, with the bottom plate part of the boat main body.
An evaporation source for use in a vacuum evaporation apparatus which is to evaporate an evaporation material onto a substrate by evaporating the evaporation material in a vacuum chamber, the evaporation source comprising:
Dependencies are inferred from the claim text.