US 12,656,217 B2 · Inspection of optical components in optical systems

Abstract

According to examples, an optical system may include optical components including an objective lens, an imager, and a controller. The controller may cause a first conjugate plane to be formed at a first location within the optical components, in which the imager is to capture an image of the first location at the first conjugate plane, and may receive the captured image of the first location at the first conjugate plane from the imager. The controller may also cause a second conjugate plane to be formed at a second location within the optical components, in which the imager is to capture an image of the second location at the second conjugate plane, and receive the captured image of the second optical component at the conjugate plane from the imager. The controller may inspect the images to determine whether there are any potential issues with the optical components.

Claims20

Dependent claims

An optical system comprising:

a plurality of optical components including an objective lens;
an imager;
and
a controller, wherein the controller is to:
cause a first conjugate plane to be formed on a first surface of a first optical component of the plurality of optical components, wherein an image of the first surface is reflected from a reflective surface onto the imager, and wherein the imager is to capture an image of the first surface at the first conjugate plane;
receive the captured image of the first surface at the first conjugate plane from the imager;
cause a second conjugate plane to be formed at a second location within the plurality of optical components, wherein the imager is to capture an image of the second location at the second conjugate plane, wherein the second location is on a second surface of the first optical component or a surface of a second optical component of the plurality of optical components;
and
receive the captured image of the second location at the conjugate plane from the imager.

6 more elements

A testing apparatus for inspecting a device under test, comprising:

a controller;
and
a memory on which is stored machine-readable instructions that when executed by the controller, cause the controller to:
cause an illumination source to output light through optical components including an objective lens onto a reflective surface, wherein light reflected from the reflective surface is directed to an imager, and wherein a conjugate plane is formed within the optical components;
cause the conjugate plane to be moved among multiple locations within the optical components, wherein, at certain ones of the multiple locations, an image of a respective location within the optical components is focused at a conjugate plane that is aligned with an image sensor of the imager;
receive images of multiple locations from the imager;
and
inspect the images of the multiple locations.

5 more elements

A method of inspecting optical components of an optical system, the method comprising:

causing, by a controller, light to be directed through optical components including an objective lens and onto a reflective surface, wherein light reflected from the reflective surface is directed through some of the optical components and onto an imager;
causing, by a controller, a first conjugate plane to be formed on a first surface of a first component of the optical components, wherein an image of a first surface is focused at a conjugate plane on the imager, and the imager is to capture an image of the first surface at the first conjugate plane;
receiving, by the controller, the captured image of the first surface from the imager;
causing, by the controller, a second conjugate plane to be formed at a second location within the optical components, wherein the imager is to capture an image of the second location at the second conjugate plane, wherein the second location is on a second surface of the first optical component or a surface of a second optical component of the optical components;
and
receiving, by the controller, the captured image of the second location from the imager.

3 more elements

Dependencies are inferred from the claim text.

Inspection of optical components in optical systems

Life of this patent

Inspection of optical components in optical systems

Life of this patent

Abstract

Claims20