Creep/deformation compensation for sensors
AssigneeEzmems Ltd.
InventorsNicola Molinazzi, Tsvi Shmilovich, Mark Kantor
Life of this patent
Estimating the term…
Abstract
A sensor device comprising at least one sensor element and a sealed fluid cell having a compensation portion and a measurement portion coupled to the at least one sensor element. The sensor device is configured such that the compensation and measurement portions deform in response to externally applied fluid pressure to thereby change internal pressure conditions inside the sealed fluid cell and cause the measurement portion to experience differential pressure conditions of corresponding to the external and internal pressures.
Claims20
A sensor device comprising:
- a sealed fluid cell having an internal cavity filled with fluid media, and a compensation portion and a measurement portion configured to interact with said fluid media in response to an externally applied fluid pressure;
- and
- at least one sensor element coupled to said measurement portion of said sealed fluid cell, said compensation and measurement portions configured to deform in response to said externally applied fluid pressure to thereby change internal pressure conditions inside said sealed fluid cell and cause said measurement portion to experience differential pressure conditions corresponding to said external fluid pressure and to an internal pressure inside said sealed fluid cell.
A method of preparing a sensor device, the method comprising forming in a base portion a deformable portion with at least one sensor element, preparing a cover portion to include a cavity and at least one compensation portion deformable towards said cavity, filling said cavity with fluid media and attaching said cover portion to said base portion such that an opening of said cavity is sealably closed by said deformable portion.
A sensor device comprising:
- a spherical or cylindrical shaped element having a circumferential channel defining an internal cavity and at least one deformable portion configured to define a compensation portion of said sensor device;
- and a circumferential deformable portion sealably attached over said circumferential channel to define a sealed fluid cell of a measurement portion of said sensor device.
Dependencies are inferred from the claim text.