High power generator and method of supplying high power pulses
AssigneeTrumpf Huettinger Sp. Z O. O.
InventorsAndrzej Klimczak, Andrzej Gieraltowski, Michal Balcerak
Life of this patent
Estimating the term…
Loading patent…
AssigneeTrumpf Huettinger Sp. Z O. O.
InventorsAndrzej Klimczak, Andrzej Gieraltowski, Michal Balcerak
Estimating the term…
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling, in a sequenced way through the plurality of LP generators. At least one pulse sequence uses a different contribution of the plurality of LP generators as a previous sequence or begins on a different LP generator as in the previous sequence.
A high power (HP) generator configured to deliver a pulsed high power with a high voltage value and/or a high current value to a capacitive load, the HP generator comprising:
A method of supplying a plasma process with high power pulses having varying amplitudes provided by a high power (HP) generator, the HP generator comprising a plurality of low power (LP) generators electrically connected in a coupling, each respective LP generator comprising a respective energy storage component, the method comprising:
Dependencies are inferred from the claim text.