Exhaust discharging device with temperature control and heat retention mechanism for preventing photoresist from crystallization and adhering to pipes, and exhaust discharging method using the same

An exhaust discharging method having a temperature control and heat retention mechanism for preventing photoresist from crystallization and from causing duct adhesion, applicable to an exhaust discharging device, and comprising steps of:

• guiding photoresist-containing exhaust from a piece of process equipment to a flow guiding portion so that the exhaust sequentially flows through a first flow guiding member, a second flow guiding member and a third flow guiding member of the flow guiding portion, wherein the first flow guiding member has a first flow guiding hole set, the second flow guiding member has a plurality of rows of second flow guiding hole sets along a vertical-axis direction for the exhaust to flow through the second flow guiding hole sets to undergo a first division, the third flow guiding member has a third flow guiding hole set and a fourth flow guiding hole set and the third flow guiding hole set is spaced apart from the fourth flow guiding hole set with a distance so that the exhaust flows through the third flow guiding hole set and the fourth flow guiding hole set to undergo a second division, at least one first temperature increasing member of the flow guiding portion is configured to directly or indirectly increase a temperature of at least one of the first flow guiding member, the second flow guiding member and the third flow guiding member, so that an environmental temperature in ductway of the flow guiding portion is within a first temperature range, and the first temperature range is higher than a boiling-point temperature of the exhaust;
• guiding the exhaust flowing out of the flow guiding portion into a flow control portion, and regulating a flow rate of the exhaust flowing through the flow control portion by adjusting and controlling a degree of openness of a valve set, wherein the flow control portion has a second temperature increasing member therein, the second temperature increasing member is configured to directly or indirectly increase a temperature of the exhaust in the flow control portion so that an environmental temperature in ductway of the flow control portion is within a second temperature range, and the second temperature range is higher than the boiling-point temperature of the exhaust;
• and
• guiding the exhaust flowing out of the flow control portion into an out-flowing gas guiding portion, wherein the out-flowing gas guiding portion is in a negative-pressure state and includes at least one third temperature increasing member and a gas outlet, the at least one third temperature increasing member is configured to directly or indirectly increase a temperature of the exhaust in the out-flowing gas guiding portion, so that an environmental temperature in ductway of the out-flowing gas guiding portion is within a third temperature range, the third temperature range is higher than the boiling-point temperature of the exhaust, the out-flowing gas guiding portion has a heat retention material layer to block cold air outside from direct contact with the out-flowing gas guiding portion so that the environmental temperature in the ductway of the out-flowing gas guiding portion is kept within the third temperature range, and the gas outlet is configured to guide the exhaust into a piece of exhaust treatment equipment.