Inspection device for sub-element of reticle pod

An inspection device for a sub-element of a reticle pod, comprising:

• a carrier platform used to carry the reticle pod or a portion of the reticle pod;
• a camera module having a lens facing the carrier platform;
• a light source module including a coaxial light source and a height adjustment mechanism, wherein the coaxial light source is connected to the camera module and is coaxial with respect to the camera module, the height adjustment mechanism is connected to at least one of the coaxial light source and the carrier platform;
• and
• a control module signally connected to the camera module and the height adjustment mechanism, wherein the control module controls the height adjustment mechanism to adjust a relative distance between the coaxial light source and the carrier platform, allowing the camera module to receive different amounts of incident light, thereby generating different effects of sharpness or blur,
• wherein while capturing the sub-element of a reticle pod, the control module controls the height adjustment mechanism to decrease the relative distance between the coaxial light source and the carrier platform and causes the camera module to capture a relatively blurry image, and
• while capturing a body of the reticle pod, the control module controls the height adjustment mechanism to increase the relative distance between the coaxial light source and the carrier platform and causes the camera module to capture a relatively sharp image.