Bonding machine with horizontal correction function and horizontal correction method thereof
AssigneeSky Tech Inc.
InventorsJing-Cheng Lin, Jung-Hua Chang, Mao-Chan Chang
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AssigneeSky Tech Inc.
InventorsJing-Cheng Lin, Jung-Hua Chang, Mao-Chan Chang
Estimating the term…
A bonding machine with horizontal correction function includes a first chamber, a second chamber, a pressing unit, a carrier, a plurality of level adjustment units, and a plurality of distance measuring units. The first chamber is configured to be connected to the second chamber to define an enclosed space therebetween. The pressing unit is disposed within the first chamber, and the carrier is disposed within the second chamber. The pressing unit faces the carrier and is configured to press the substrates placed on the carrier. The leveling units are disposed on the first chamber, and the distance measuring units are disposed on the second chamber. Each distance measuring unit is configured to project a detecting beam onto the pressing unit, to measure the level of the pressing unit so as to adjust the level of the pressing unit through the level adjustment unit.
A bonding machine with horizontal correction function, comprising:
Dependencies are inferred from the claim text.