Method and apparatus for removing expansion bolt for semiconductor processing apparatus
AssigneesTsmc China Company Limited, Taiwan Semiconductor Manufacturing Company, Ltd.
InventorsXudong Liu, Chi Sun, Guangren Shi, Jinsong Zeng
Life of this patent
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Abstract
A method includes following steps. A washer and a nut are removed from a threaded rod of an expansion bolt that is secured to a drilled hole. After removing the washer and the nut, foot of a semiconductor processing apparatus is removed from the threaded rod. The washer and the nut are placed back to the threaded rod of the expansion bolt. A lifting fork of a bolt lifter is moved such that fingers of the lifting fork are located directly below the washer. The lifting fork is lifted, by using a hydraulic cylinder, to extract the washer, the nut, and the threaded rod of the expansion bolt away from the drilled hole.
Claims20
A method, comprising:
- removing a washer and a nut from a threaded rod of an expansion bolt that is secured to a drilled hole;
- after removing the washer and the nut, removing a foot of a semiconductor processing apparatus from the threaded rod;
- placing the washer and the nut back to the threaded rod of the expansion bolt;
- moving a lifting fork of a bolt lifter such that fingers of the lifting fork are located directly below the washer;
- and
- lifting the lifting fork, by using a hydraulic cylinder, to extract the washer, the nut, and the threaded rod of the expansion bolt away from the drilled hole, wherein lifting the lifting fork comprises lifting a top plate of the bolt lifter by using the hydraulic cylinder, wherein the bolt lifter comprises legs vertically extending from opposite sides of the top plate to opposite sides of the lifting fork.
A method, comprising:
- removing a foot of a semiconductor processing apparatus from an expansion bolt secured to a hole in a floor;
- and
- after removing the foot of the semiconductor processing apparatus, extracting a threaded rod of the expansion bolt from the hole in the floor, the extraction comprising:
- after removing the foot, placing a washer and a nut onto the threaded rod;
- positioning a lifting fork of a bolt lifter to engage the expansion bolt in a slot on the lifting fork;
- and
- pressurizing a hydraulic cylinder located between the lifting fork and a top plate of the bolt lifter, such that the lifting fork moves upwards to extract the threaded rod of the expansion bolt, wherein pressurizing the hydraulic cylinder is performed such that the lifting fork presses upwards against a bottom surface of the washer fitted on the threaded rod.
A method, comprising:
- removing a washer and a nut from a threaded rod of an expansion bolt that is secured to a drilled hole in a floor;
- after removing the washer and the nut, removing a foot of a semiconductor processing apparatus from the threaded rod;
- placing the washer and the nut back to the threaded rod of the expansion bolt;
- moving a lifting fork of a bolt lifter to a level below the washer placed on the threaded rod of the expansion bolt;
- and
- pressurizing a hydraulic cylinder located between the lifting fork and a top plate of the bolt lifter, such that the lifting fork moves upwards to extract the threaded rod away from the floor, wherein the lifting fork further extracts an expandable sleeve of the expansion bolt away from the floor.
Dependencies are inferred from the claim text.