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US 12,637,589 B2Granted
Use of sulfonic acids in dry electrolytes to polish metal surfaces through ion transport
AssigneeDrylyte, S.L.
InventorsPau Sarsanedas Millet, Marc Sarsanedas Gimpera
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Abstract
Use of dry electrolytes to polish metal surfaces through ion transport. A conductive liquid of the dry electrolyte includes at least a sulfonic acid. Polishing of the metal surface includes inducing movement between the dry electrolytes and the metal surface. The amount of sulfonic acid in the conductive liquid being such that a neutralizing of the sulfonic acid on the metal surface is not needed after the polishing process is complete.
Claims11
A method of polishing a surface of a metal by ion transport, comprising:
- applying an electrical potential difference between a metal surface and a counter electrode, wherein said metal surface and said counter electrode are electrically coupled by contact with a plurality of porous particles,
- wherein said porous particles (a) comprise a polymer bound to a first organic sulfonic acid moiety, and
- (b) retain an electrically conductive aqueous solution consisting and wherein a concentration of the methanesulfonic acid in the electrically conductive liquid aqueous solution is 4% by weight to 70% by weight of methanesulfonic acid and water and, optionally, a complexing agent,
- wherein said electrically conductive aqueous solution is present in an amount sufficiently below the saturation point of the porous particle that there is no observable free liquid.
1 more element
Dependencies are inferred from the claim text.