Method of manufacturing mask assembly

A method of manufacturing a mask assembly, comprising:

• tensioning a mask sheet;
• connecting the tensioned mask sheet with a mask frame;
• and
• defining opening processing areas in the tensioned mask sheet to form openings respectively corresponding to the opening processing areas, the defining of the opening processing areas comprising:
• defining initial opening processing areas in the tensioned mask sheet in a first direction and in a second direction intersecting the first direction to determine a processing sequence of the initial opening processing areas;
• calculating cumulative deformation amounts accumulated in each of the initial opening processing areas based on the processing sequence;
• and
• correcting a size and a position of each of the initial opening processing areas based on the cumulative deformation amounts, wherein
• an n-th opening processing area that is processed at an n-th order among the opening processing areas has a center set at a second position to form an n-th opening having a center at a first position, the opening processing areas arranged with the n-th opening processing area in a line in the first direction are defined as a first group,
• in case that a number of the opening processing areas which are processed after the n-th opening processing area and are arranged in an upward direction parallel to the first direction from the n-th opening processing area among the opening processing areas of the first group, is defined as m and a number of the opening processing areas which are processed after the n-th opening processing area and are arranged in a downward direction parallel to the first direction from the n-th opening processing area among the opening processing areas of the first group, is defined as 1, a difference in position between the first position and the second position in the first direction is proportional to a difference between m and 1, and
• each of m and 1 is zero (0) or a natural number,
• in case that m is smaller than 1, the second position is disposed below the first position in a plan view,
• in case that m is greater than 1, the second position is disposed above the first position in a plan view,
• a first tensile force acts on the tensioned mask sheet in the first direction,
• the difference in position between the first position and the second position in the first direction is X,
• X satisfies X=|m−1|(FP/AE),
• F denotes the first tensile force,
• P denotes a width in the first direction between a center of the opening processing area and an edge of the opening processing area,
• A denotes a size in cross-section of an area to which the first tensile force is applied in the opening processing area, and
• E denotes an elastic modulus of the mask sheet.

A method of manufacturing a mask assembly, comprising:

• tensioning a mask sheet;
• connecting the tensioned mask sheet with a mask frame;
• defining primary opening processing areas arranged in an arrangement on the tensioned mask sheet and each having a center point whose position is corrected;
• and
• forming final opening areas respectively corresponding to the primary opening processing areas, the forming of the final opening areas comprising:
• irradiating a laser beam to each of the primary opening processing areas based on a processing sequence of the primary opening processing areas to sequentially form secondary opening processing areas, and
• a position of a center point of at least one of the secondary opening processing areas is different from a position of a center point of a corresponding final opening area among the final opening areas, wherein
• the primary opening processing areas comprise first to a-th opening processing areas arranged in a first direction between one end and another end of the tensioned mask sheet in a plan view,
• the final opening areas comprise first to a-th openings respectively corresponding to the first to a-th opening processing areas and formed through the tensioned mask sheet,
• each of the first to a-th opening processing areas has a first center point,
• each of the first to a-th openings has a second center point,
• a position of the first center point of at least one of the first to a-th opening processing areas is different from a position of the second center point of an opening corresponding thereto, and
• a is a natural number equal to or greater than two (2),
• the laser beam is sequentially irradiated from the first opening processing area disposed closest to the one end and to the a-th opening processing area in the first direction,
• the laser beam is first irradiated to the first opening processing area among the first to a-th opening processing areas to form a secondary first opening processing area having a same center point as the first center point of the first opening processing area, and
• a position of a center point of the secondary first opening area is different from a position of the second center point of the first opening in the first direction,
• the laser beam is irradiated at an a-th order to the a-th opening processing area among the first to a-th opening processing areas to form a secondary a-th opening processing area having a same center point as the first center point of the a-th opening processing area, and
• a position of a center point of the secondary a-th opening area is the same as a position of the second center point of the a-th opening in the first direction.

A method of manufacturing a mask assembly, comprising:

• tensioning a mask sheet;
• connecting the tensioned mask sheet with a mask frame;
• defining primary opening processing areas arranged in an arrangement on the tensioned mask sheet and each having a center point whose position is corrected;
• and
• forming final opening areas respectively corresponding to the primary opening processing areas, the forming of the final opening areas comprising:
• irradiating a laser beam to each of the primary opening processing areas based on a processing sequence of the primary opening processing areas to sequentially form secondary opening processing areas, and
• a position of a center point of at least one of the secondary opening processing areas is different from a position of a center point of a corresponding final opening area among the final opening areas, wherein
• the primary opening processing areas comprise first to a-th opening processing areas arranged in a first direction between one end and another end of the tensioned mask sheet in a plan view,
• the final opening areas comprise first to a-th openings respectively corresponding to the first to a-th opening processing areas and formed through the tensioned mask sheet,
• each of the first to a-th opening processing areas has a first center point,
• each of the first to a-th openings has a second center point,
• a position of the first center point of at least one of the first to a-th opening processing areas is different from a position of the second center point of an opening corresponding thereto,
• a is a natural number equal to or greater than two (2),
• the opening processing area disposed at a center in the first direction among the first to a-th opening processing areas is defined as a center opening processing area, and
• the laser beam is sequentially irradiated to the first to a-th opening processing areas from the opening processing area disposed farthest from the center opening processing area.

A method of manufacturing a mask assembly, comprising:

• tensioning a mask sheet;
• connecting the tensioned mask sheet with a mask frame;
• defining primary opening processing areas arranged in an arrangement on the tensioned mask sheet and each having a center point whose position is corrected;
• and
• forming final opening areas respectively corresponding to the primary opening processing areas, the forming of the final opening areas comprising:
• irradiating a laser beam to each of the primary opening processing areas based on a processing sequence of the primary opening processing areas to sequentially form secondary opening processing areas, and
• a position of a center point of at least one of the secondary opening processing areas is different from a position of a center point of a corresponding final opening area among the final opening areas, wherein
• the primary opening processing areas comprise first to a-th opening processing areas arranged in a first direction between one end and another end of the tensioned mask sheet in a plan view,
• the final opening areas comprise first to a-th openings respectively corresponding to the first to a-th opening processing areas and formed through the tensioned mask sheet,
• each of the first to a-th opening processing areas has a first center point,
• each of the first to a-th openings has a second center point,
• a position of the first center point of at least one of the first to a-th opening processing areas is different from a position of the second center point of an opening corresponding thereto,
• a is a natural number equal to or greater than two (2),
• the opening processing area disposed at a center in the first direction among the first to a-th opening processing areas is defined as a center opening processing area, and
• the laser beam is sequentially irradiated according to the processing sequence that gradually goes away from the center opening processing area.