US 12,607,938 B2Granted

Imaging system

AssigneeASML Netherlands B.V.

InventorsAlbertus Hartgers, Marco Matheus Louis Steeghs, Gerardus Hubertus Petrus Maria Swinkels, Giovanni Imponente, Nicholas William Maria Plantz, Wouter Joep Engelen, Marcus Adrianus Van De Kerkhof

Life of this patent

Estimating the term…

patentgrep

Loading patent…

Abstract

A plate for use in an imaging system to determine at least two optical properties of an illumination beam of the imaging system, the imaging system configured to illuminate an illumination region with the illumination beam, the plate including a plurality of markers, wherein a first subset of the plurality of markers includes a first type of markers for determining a first optical property of the illumination beam, and a second subset of the plurality of markers includes a second type of markers for determining a second optical property of the illumination beam, wherein the plurality of markers are located within a marker region of the plate and the marker region generally corresponds to the illumination region.

Claims20

Dependent claims

An imaging system comprising:

a first plane configured to receive an illumination beam in a first region;
a second plane configured to receive, in a second region of the second plane, an image of the first region;
a first plate comprising a first plurality of markers, wherein:
a first subset of the first plurality of markers comprises a first type of markers for determining a first optical property of the illumination beam;
a second subset of the first plurality of markers comprises a second type of markers for determining a second optical property of the illumination beam, the second type of markers having a different form than the first type of markers;
and
the first plate is positionable in the first plane such that the first plurality of markers are located within the first region;
a second plate comprising a second plurality of markers, wherein:
a first subset of the second plurality of markers comprises a first type of markers for determining the first optical property of the illumination beam;
a second subset of the second plurality of markers comprises a second type of markers for determining the second optical property of the illumination beam;
the arrangement of the second plurality of markers generally matches the arrangement of the first plurality of markers;
and
the second plate is positionable in the second plane such that the second plurality of markers are located within the second region;
and
a detector positionable in a third plane and operable to:
receive radiation from the second plate when the second plate is disposed in the second region;
and
output a signal indicative of the first optical property and/or second optical property of the illumination beam.

15 more elements

a first subset of the plurality of markers comprises a first type of markers for determining a first optical property of the illumination beam;
a second subset of the plurality of markers comprises a second type of markers for determining a second optical property of the illumination beam, the second type of markers having a different form than the first type of markers;
and
the plurality of markers are located within a marker region of the plate;
and
the marker region generally corresponds to the illumination region.

3 more elements

Dependencies are inferred from the claim text.