Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Koji Ichikawa
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AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Koji Ichikawa
Estimating the term…
Disclosed are a carboxylate represented by formula (I), a carboxylic acid generator and a resist composition: wherein L1 and L2 each represent a single bond or a hydrocarbon group which may have a substituent, —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—, Ar1 represents an aromatic hydrocarbon group or a heterocyclic aromatic hydrocarbon group, R3 represents *—O—R10, *—O—CO—R10, etc., R10 represents an acid-labile group, R4 represents a halogen atom, a haloalkyl group or a hydrocarbon group, the hydrocarbon group may have a substituent, —CH2— included in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—, m4 represents an integer of 0 to 8, and Z+ represents an organic cation.
A carboxylate represented by formula (I):
Dependencies are inferred from the claim text.