Augmentation of electron energy loss spectroscopy in charged particle microscopes
AssigneeFEI Company
InventorWouter René J. Van den Broek
Life of this patent
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Abstract
Systems and techniques for processing electron energy loss spectrum (EELS) data are described. A method for processing EELS data can include receiving spectrum data. The spectrum data can be structured as an array of EELS spectra associated with a spatial region of a material sample. The method can include generating a reference spectrum using the spectrum data. The method can include generating a sample spectrum using the reference spectrum and the spectrum data. The sample spectrum can include a weighted average spectrum. The method can also include outputting the sample spectrum.
Claims20
A computer-implemented method for processing electron energy loss spectrum (EELS) data, the method comprising:
- generating spectrum data using an electron microscope, the spectrum data being structured as an array of EELS spectra associated with a spatial region of a material sample;
- generating a reference spectrum using the spectrum data;
- generating a sample spectrum using the reference spectrum and the spectrum data, comprising generating a weighted average EELS spectrum of the EELS spectra, including one or more characteristic edges of the material sample;
- and
- outputting the sample spectrum.
One or more non-transitory machine-readable media storing executable instructions that, when executed by a machine, cause the machine to perform operations comprising:
- generating spectrum data using an electron microscope, the spectrum data being structured as an array of EELS spectra associated with a spatial region of a material sample;
- generating a reference spectrum using the spectrum data;
- generating a sample spectrum using the reference spectrum and the spectrum data, comprising generating a weighted average EELS spectrum of the EELS spectra, including one or more characteristic edges of the material sample;
- and
- outputting the sample spectrum.
A computer-implemented method for processing electron energy loss spectrum (EELS) data, the method comprising:
- generating spectrum data using an electron microscope, the spectrum data being structured as an array of EELS spectra associated with a spatial region of a material sample;
- generating a reference spectrum using the spectrum data;
- generating a sample spectrum using the reference spectrum and the spectrum data, wherein the sample spectrum comprises a weighted average EELS spectrum, including edge information characteristic of the material sample, wherein generating the sample spectrum comprises:
- generating respective weight parameters for at least a subset of the EELS spectra that includes the edge information;
- and generating the weighted average spectrum using the respective weight parameters;
- and
- outputting the sample spectrum.
Dependencies are inferred from the claim text.