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US 12,607,501 B2Granted
Conditioning device for reducing positional sensitivity of laser beam on photodetector and method of using the same
AssigneeElectro Scientific Industries, Inc.
InventorPatrick Zabawa
Life of this patent
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Abstract
In a system, a conditioning device includes a diffuser, a lens configured to focus a beam of laser energy onto the diffuser and an iris configured to transmit at least a portion of the beam of laser energy transmitted by the diffuser.
Claims18
A system, comprising:
- a conditioning device including:
- a diffuser;
- a lens configured to focus a beam of laser energy onto the diffuser;
- and
- an iris configured to transmit at least a portion of the beam of laser energy transmitted by the diffuser.
2 more elements
A method, comprising:
- focusing a beam of laser energy having a wavelength in the ultra-violet (UV) range of the electromagnetic spectrum;
- diffusing the focused beam of laser energy;
- and
- propagating at least a portion of the diffused beam of laser energy through an aperture and onto a photodetector.
1 more element
Dependencies are inferred from the claim text.