Vacuum evaporation method

A vacuum evaporation method for evaporating on a to-be-evaporated object by vaporizing an evaporation material inside a vacuum chamber, comprising:

• feeding a wire-shaped evaporation material to a vacuum chamber,
• providing an evaporation boat as an evaporation source having a boat main body with a containing part for the evaporation material, and electrode mounting plate parts respectively extending outward at both ends of the boat main body;
• feeding the wire-shaped evaporation material from above a bottom plate of the boat main body defining the containing part of the evaporation material in a manner to come into contact with the bottom plate;
• applying electric power across both the electrode mounting plate parts in order to heat the boat main body, thereby vaporizing the evaporation material inside the containing part, and
• continuously displacing the front end part of the wire-shaped evaporation material relative to the boat main body while the wire-shaped evaporation material is being fed to the vacuum chamber such that the movement restrains generation of a temperature gradient in the bottom plate of the boat main body,
• provided that two axis directions extending perpendicularly to each other in an in-plane of the bottom plate of the boat main body defining the containing part are defined as X-axis direction and Y-axis direction, respectively, and further provided that such a position of the bottom plate of the boat main body as initially comes into contact with the front end part of the wire-shaped evaporation material is defined as an origin,
• wherein, in the continuously displacing, the front end part of the evaporation material keeps on sequentially repeating, from the origin, a relative movement in the X-axis direction and a relative movement in the Y-axis direction, and finally returning to the origin.