Deposition apparatus and deposition method using deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJaemin Hong, Hyoungwook Kim, Seongcheol Lee
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AssigneeSamsung Display Co., Ltd.
InventorsJaemin Hong, Hyoungwook Kim, Seongcheol Lee
Estimating the term…
A deposition apparatus and a deposition method by using the deposition apparatus are provided. The deposition apparatus includes a mask including deposition openings, a mask frame supporting the mask and including first, second, third, and fourth portions and an opening overlapping the deposition openings and surrounded by the first, second, third, and fourth portions, a stage disposed on a rear surface of the mask frame, a pin unit connected to the stage, and a magnet unit disposed on a rear surface of the stage and overlapping the mask frame. The first portion and the second portion of the mask frame extend in a first direction, and the third portion and the fourth portion of the mask frame extend in a second direction intersecting the first direction, and the pin unit supports a side surface of the first portion of the mask frame and is movable in the second direction.
A deposition apparatus comprising:
A deposition apparatus comprising:
Dependencies are inferred from the claim text.