Substrate processing apparatus
AssigneeTDK Corporation
InventorsYohei Sato, Hiroshi Koizumi, Toshinobu Miyagoshi, Osamu Shindo, Seijiro Sunaga, Mitsuyoshi Makida, Makoto Yamashita, Yasuo Kato, Ryo Shindo, Masashi Matsumoto
Life of this patent
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Abstract
A substrate processing apparatus 10 applies pressure to a substrate 2 which is an object to be pressurized arranged on an upper jig plate 44. The substrate processing apparatus 10 includes a lower jig plate 46 arranged below the upper jig plate 44, an installation base 47 provided on the lower jig plate 46 and the substrate 2 is arranged; and the installation base is temporarily fixed to the installation base 47 in a deformable manner.
Claims22
A substrate processing apparatus for applying pressure on
- an object to be pressurized through an upper jig plate comprising a lower jig plate under the upper jig plate,
- an installation base on the lower jig plate, and
- a temporary fixing jig on the lower jig plate, wherein
- the object is placed on the installation base,
- the installation base is temporarily fixed to the lower jig plate so that deformation of the installation base can be absorbed by the temporary fixing jig, and
- the temporary fixing jig comprises a movable member pushing an edge of the installation base and a resilient body holding the movable member in a movable manner.
A substrate processing apparatus for applying pressure on
- an object to be pressurized through an upper jig plate comprising a lower jig plate under the upper jig plate,
- an installation base on the lower jig plate, and
- a temporary fixing jig on the lower jig plate, wherein
- the object is placed on the installation base,
- the installation base is made of ceramics or glass, and
- the temporary fixing jig comprises a movable member pushing an edge of the installation
- base and a resilient body holding the movable member in a movable manner.
A substrate processing apparatus for applying pressure on an object to be pressurized through an upper jig plate comprising
- a lower jig plate under the upper jig plate,
- an installation base on the lower jig plate, and
- a temporary fixing frame on the lower jig plate and contacting a part of
- an edge of the installation base, wherein
- the object is placed on the installation base,
- the installation base is temporarily fixed to the lower jig plate so the deformation of the installation base can be absorbed by the temporary fixing frame,
- the installation base comprises a base slanted portion at the edge of the installation base, and
- the temporary fixing frame comprises an inner slanted portion engaging the base slanted portion at an inner side of the temporary fixing frame where the edge of the installation base and the temporary fixing frame come into contact.
A substrate processing apparatus for applying pressure on an object to be pressurized through an upper jig plate comprising
- a lower jig plate under the upper jig plate,
- an installation base on the lower jig plate, and
- a temporary fixing frame on the lower jig plate and contacting a part of an edge of the installation base, wherein
- the object is placed on the installation base,
- the installation base is made of ceramics or glass,
- the installation base comprises a base slanted portion at the edge of the installation base, and the temporary fixing frame comprises an inner slanted portion engaging the base slanted portion at an inner side of the temporary fixing frame where the edge of the installation base and the temporary fixing frame come into contact.
A substrate processing apparatus for applying pressure on an object to be pressurized through an upper jig plate comprising
- a lower jig plate under the upper jig plate,
- an installation base on the lower jig plate, and
- a temporary fixing jig on the lower jig plate, wherein
- the object is placed on the installation base,
- the installation base is temporarily fixed to the lower jig plate so that deformation of the installation base can be absorbed by the temporary fixing jig,
- the temporary fixing jig comprises a movable member,
- the movable member is pushed towards the installation base from the temporary fixing jig due to a resilient force received from the temporary fixing jig,
- the movable member is pushed back towards the temporary fixing jig from the installation base due to a stress received from the installation base,
- the installation base is roughly a circular shape, and
- the temporary fixing frame and the temporary fixing jig are respectively at opposing positions in a radial direction of the installation base.
A substrate processing apparatus for applying pressure on an object to be pressurized through an upper jig plate comprising
- a lower jig plate under the upper jig plate,
- an installation base on the lower jig plate, and
- a temporary fixing jig on the lower jig plate, wherein
- the object is placed on the installation base,
- the installation base is made of ceramics or glass,
- the temporary fixing jig comprises a movable member,
- the movable member is pushed towards the installation base from the temporary fixing jig due to a resilient force received from the temporary fixing jig,
- the movable member is pushed back towards the temporary fixing jig from the installation base due to a stress received from the installation base, the installation base is roughly a circular shape, and
- the temporary fixing frame and the temporary fixing jig are respectively at opposing positions in a radial direction of the installation base.
Dependencies are inferred from the claim text.