Neural electrode for measuring neural signal and method for manufacturing the same
AssigneeElectronics and Telecommunications Research Institute
InventorsYong Hee Kim, Sang Don Jung
Life of this patent
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Abstract
Disclosed are a neural electrode for measuring a neural signal and a method for manufacturing the same. The method includes forming a bottom electrode on a substrate, forming a passivation layer exposing a portion of the bottom electrode, forming a metal layer including a gold nano-structure and a silver nano-structure on the bottom electrode, selectively forming the gold nano-structure having porosity by selectively removing the silver nano-structure, forming lower nano-particles on an inner sidewall of the gold nano-structure, and forming an upper nano-coating layer on the lower nano-particles and the inner sidewall of the gold nano-structure.
Claims16
A method for manufacturing a neural electrode, the method comprising:
- forming a bottom electrode on a substrate;
- forming a passivation layer exposing a portion of the bottom electrode;
- forming a metal layer including a gold nano-structure and a silver nano-structure on the bottom electrode;
- selectively forming the gold nano-structure having porosity by selectively removing the silver nano-structure;
- forming lower nano-particles on an inner sidewall of the gold nano-structure;
- and
- forming an upper nano-coating layer on the lower nano-particles and the inner sidewall of the gold nano-structure.
A neural electrode for measuring a neural signal, the neural electrode comprising:
- a bottom electrode on a substrate;
- a passivation layer covering both edges of the bottom electrode;
- a gold nano-structure having porosity and provided on the bottom electrode exposed from the passivation layer;
- lower nano-particles provided on an inner sidewall of the gold nano-structure;
- and
- an upper nano-coating layer provided on the lower nano-particles and the inner sidewall of the gold nano-structure,
- wherein the lower nano-particles contact a sidewall of the gold nano-structure to increase a surface area of the upper nano-coating layer.
Dependencies are inferred from the claim text.