Ceramic susceptor
AssigneeMiCo Ceramics Ltd.
InventorHyung-Jun Cho
Life of this patent
Estimating the term…
Abstract
Disclosed is a ceramic susceptor. The ceramic susceptor may include: an insulating plate in which one or more electrodes are arranged; a hollow shaft with one end connected to the insulating plate; and one or more electrode rods connected to the electrodes. The hollow shaft may include one or more side wall holes penetrating an interior of a side wall, and the one or more electrode rods may include one or more first electrode rods, each of which is electrically connected to a first electrode among the one or more electrodes. The first electrode rods may extend through the side wall holes, respectively.
Claims12
A ceramic susceptor comprising:
- an insulating plate in which one or more electrodes are arranged;
- a hollow shaft with one end connected to the insulating plate;
- and
- one or more electrode rods connected to the one or more electrodes,
- wherein the hollow shaft comprises one or more side wall holes penetrating an interior of a side wall,
- wherein the one or more electrode rods comprise one or more first electrode rods, each of which has one end electrically connected to a first electrode among the one or more electrodes, the one or more first electrode rods extending through the one or more side wall holes, respectively, and
- wherein the one or more first electrode rods each comprise a gas flow path formed of an internal empty space configured to introduce gas from another end, and one or more gas holes in communication with the gas flow path.
A ceramic susceptor comprising:
- an insulating plate in which one or more electrodes are arranged;
- a hollow shaft with one end connected to the insulating plate;
- and
- one or more electrode rods connected to the one or more electrodes,
- wherein the hollow shaft comprises a side wall and a plurality of convex portions that are convex radially inward from an inner surface of the side wall, and side wall holes penetrating the side wall and respectively disposed in each of the plurality of convex portions,
- wherein the one or more electrode rods comprise a plurality of first electrode rods, and
- wherein each of the plurality of first electrode rods has one end electrically connected to a first electrode among the one or more electrodes, and extends through each of the side wall holes.
Dependencies are inferred from the claim text.