Method for manufacturing light-emitting element and light-emitting device using photolithography technique
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Sachiko Kawakami, Nobuharu Ohsawa, Yuji Iwaki, Ryota Hodo, Kentaro Sugaya, Shinya Sasagawa, Takahiro Fujie, Yoshikazu Hiura, Toshiki Sasaki, Takeyoshi Watabe, Kunihiko Suzuki
Life of this patent
Estimating the term…