Display substrate and manufacturing method thereof, and display device

A display substrate having a display area and a non-display area, the display area including pixel circuit areas;

• the display substrate comprising:
• a substrate;
• first active layers, a first functional layer, a second active layer, a second functional layer and an interlayer dielectric layer stacked in sequence on the substrate;
• first vias each penetrating at least a portion of the second functional layer and at least a portion of the first functional layer, the first vias each exposing a partial surface of a first active layer;
• second vias each penetrating the interlayer dielectric layer, the second vias being respectively communicated with the first vias;
• third vias each penetrating the interlayer dielectric layer and at least another portion of the second functional layer, the third vias each exposing a partial surface of the second active layer;
• fifth grooves each penetrating at least yet another portion of the second functional layer and at least another portion of the first functional layer and each located between two adjacent pixel circuit areas;
• and
• a first groove penetrating at least yet another portion of the second functional layer and at least yet another portion of the first functional layer;
• wherein an aperture diameter of a first via is less than an aperture diameter of a second via, and is less than an aperture diameter of a third via;
• and
• a depth of a second via in the second vias is less than or equal to a depth of a third via in the third vias;
• the depth of the third via is less than a depth of a first via in the first vias;
• the depth of the first via is less than a depth of a fifth groove;
• the depth of the fifth groove is equal to a depth of the first groove.