Thin film transistor and array substrate
AssigneeTcl China Star Optoelectronics Technology Co., Ltd.
InventorXiaobo Hu
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AssigneeTcl China Star Optoelectronics Technology Co., Ltd.
InventorXiaobo Hu
Estimating the term…
The present application discloses a thin film transistor and an array substrate. The thin film transistor includes a gate electrode, a source electrode, and a drain electrode, and at least one of the gate electrode, the source electrode, or the drain electrode is a composite film layer. The composite film layer includes a metal layer, a low reflection functional layer, and an alloy layer which are arranged in layers. The alloy layer covering a surface of the low reflection functional layer can enhance stability of the low reflection functional layer. Because adhesion between the alloy layer and dielectric layers such as silicon oxide, silicon nitride, and silicon oxynitride is stronger than that of the low reflection functional layer, the bulge phenomenon is not easy to occur under a high temperature environment.
A thin film transistor comprising a substrate, the thin film transistor further comprising:
A thin film transistor, comprising a gate electrode, a source electrode, and a drain electrode, wherein at least one of the gate electrode, the source electrode, or the drain electrode is a composite film layer, and the composite film layer comprises a metal layer, a low reflection functional layer, and an alloy layer which are arranged in layers,
Dependencies are inferred from the claim text.