Transition control in a bias supply
AssigneeAdvanced Energy Industries, Inc.
InventorHien Minh Nguyen
Life of this patent
Estimating the term…
Abstract
Bias supplies and bias control methods are disclosed. One method comprises applying an asymmetric periodic voltage waveform and providing a corresponding current waveform at an output node relative to a return node; receiving a signal to change from a current state of the asymmetric periodic voltage waveform to a next state of the asymmetric periodic voltage waveform; and adjusting, during a transition from the current state to the next state, at least one portion of the asymmetric periodic voltage waveform and simultaneously adjusting a fundamental frequency of the asymmetric periodic voltage waveform to settle at the next state.
Claims17
A bias supply to apply a periodic voltage comprising:
- a switch network and at least one power supply, the switch network and the at least one power supply configured, in combination, to apply a periodic voltage waveform at a first node;
- and
- a controller configured to:
- receive a signal to change from a present state to a next state;
- and
- adjust, during a transition from the present state to the next state, a voltage of the at least one power supply and simultaneously control a switching frequency of the switch network to settle at the next state after a transition wherein the controller is configured to adjust the frequency according to a predefined transition time using a predefined transition type.
A method for applying a periodic voltage comprising:
- applying a periodic voltage waveform;
- receiving a signal to change from a present state of the periodic voltage waveform to a next state of the periodic voltage waveform;
- and
- adjusting, during a transition from the present state to the next state, at least one portion of the periodic voltage waveform and simultaneously adjusting a frequency of the periodic voltage waveform to settle at the next state after a transition, wherein the adjusting comprises adjusting the frequency according to a predefined transition time using a predefined transition type.
A non-transitory medium encoded with instructions that are executable by a processor and/or are readable by a field programmable gate array, the instructions comprising instructions to:
- cause a bias supply to apply a periodic voltage waveform;
- process a signal to change from a present state of the periodic voltage waveform to a next state of the periodic voltage waveform;
- and
- cause the bias supply to adjust, during a transition from the present state to the next state, at least one portion of the periodic voltage waveform and simultaneously adjust a frequency of the periodic voltage waveform to settle at the next state, wherein the frequency during the transition is different than the frequency during either the present state or the next state.
Dependencies are inferred from the claim text.