Substrate treating apparatus and substrate treating method

A substrate treating apparatus comprising:

• a support configured to seat a substrate;
• a first light irradiator configured to irradiate a first light source in a line form onto the substrate in a diagonal direction;
• a ring member positioned around the support and having a step formed in an inner edge;
• a second light source configured to irradiate a second light source in a line form in a diagonal direction and so an intersection is formed so a direction of the second light source is bent in another direction at a point at which the step starts;
• an image acquisition unit configured to acquire first image information of the first light source which is irradiated onto the substrate and the second light source which is irradiated onto the ring member;
• and
• an image analyzer including,
• a line extractor which generates a line image by applying a noise filter and removing a noise element which has deviated from a line center of a first line light source and a second line light source, in a state in which an R channel and a G channel is coupled in an RGB channel of image information which is input from the image acquisition unit so a region except from the first line light source and the second line light source is configured to be a black region;
• a binarizator configured to binarize a region at which the first line light source and the second line light source exist within an input line image to be a first color, and a region at which the first line light source and the second line light do not exist to be a second color, after the line image is input by communicating with the line extractor;
• a region separator which is input with a coordinate image from the binarizator and divides the coordination image which is input to a first interest region at which the first line light source exists and a second interest region at which the second line light source exists;
• a substrate region position detector which detects a position of the substrate by being input with a first interest region image from the region separator and then detecting through a coordinate value of a point at which the first line light source ends within the first interest region image;
• a ring member region position detector which detects a position of the ring member by being input with a second interest region image from the region separator and then detecting through a coordinate value of a point at which the second line light sources intersect with each other within the second interest region image;
• a substrate distance calculator which calculates a distance value between a coordinate value of a point at which the first line light source ends which is detected at the substrate region position detector, and a point at which the second line light sources intersect with each other which is detected at the ring member region position detector;
• and
• a substrate position adjuster which aligns to thereby adjust the position of the substrate by transmitting a separation value to a transfer apparatus for adjusting the position of the substrate, if the separation value is calculated by calculating how much the distance value calculated through the substrate distance calculator deviates from a predetermined deviation value, and the separation value deviates from the predetermined deviation value.