System for supplying photoresist and method for managing photoresist
AssigneeSemes Co., Ltd.
InventorsHae Kyung Kim, Dae Sung Kim, Woo Sin Jung
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AssigneeSemes Co., Ltd.
InventorsHae Kyung Kim, Dae Sung Kim, Woo Sin Jung
Estimating the term…
Provided is a system for supplying a photoresist. In an embodiment, a system for supplying a photoresist includes a pressure adjustment container provided to a supply line connected from a chemical liquid bottle to a first tank, and the pressure adjustment container includes a housing having a space formed therein, a separator separating the space of the housing into a first space and a second space, an inflow port making a photoresist flow in the first space, a discharge port discharging the photoresist from the first space, and a pressurized fluid inflow port supplying a pressurized fluid to the second space, and a volume of the first space varies depending on the supply of the pressurized fluid.
A system for supplying a photoresist, the system comprising:
Dependencies are inferred from the claim text.