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US 12,601,970 B2Granted
Photosensitive resin composition, method for manufacturing patterned cured product, cured product, interlayer insulating film, cover coat layer, surface protective film, and electronic component
AssigneeHd Microsystems, Ltd.
InventorsHiroko Yotsuyanagi, Daisaku Matsukawa, Noriyuki Yamazaki
Life of this patent
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Abstract
A photosensitive resin composition comprising (A) a polyimide precursor having a polymerizable unsaturated bond; (B) a polymerizable monomer; (C) a photopolymerization initiator; and (D) an ultraviolet absorber.
Claims19
A photosensitive resin composition comprising:
- (A) a polyimide precursor having a structural unit represented by the following formula (1);
- (B) a polymerizable monomer having two or more groups comprising a polymerizable unsaturated double bond;
- (C) a photopolymerization initiator;
- and
- (D) one or more selected from the group consisting of 2,2′,4,4′-tetrahydroxybenzophenone, 2,2′-dihydroxy-4,4′-dimethoxybenzophenone, 4-[ethyl (2-hydroxyethyl)amino]-4′-nitroazobenzene, (1E,6E)-1,7-bis(4-hydroxy-3-methoxyphenyl)-1,6-heptadiene-3,5-dione, and 1,7-bis(4-hydroxyphenyl)-1,6-heptadiene-3,5-dione:
- wherein in the formula (1), X1 is a tetravalent group having one or more aromatic groups;
- a —COOR1 group and a —CONH— group are on the ortho-position to each other;
- a —COOR2 group and a —CO— group are on the ortho-position to each other;
- Y1 is a divalent group having one or more aromatic groups;
- R1 and R2 are independently a hydrogen atom, a group represented by the following formula (2), or an aliphatic hydrocarbon group including 1 to 4 carbon atoms;
- provided that at least one of R1 and R2 is the group represented by the formula (2):
- wherein in the formula (2), R3 to R5 are independently a hydrogen atom or an aliphatic hydrocarbon group including 1 to 3 carbon atoms;
- and m is an integer of 1 to 10.
10 more elements
A photosensitive resin composition comprising:
- (A) a polyimide precursor having a polymerizable unsaturated bond;
- (B) a polymerizable monomer;
- (C) a photopolymerization initiator;
- and
- (D) 4-[ethyl (2-hydroxyethyl)amino]-4′-nitroazobenzene.
2 more elements
A photosensitive resin composition comprising:
- (A) a polyimide precursor having a polymerizable unsaturated bond;
- (B) a polymerizable monomer;
- (C) a photopolymerization initiator;
- and
- (D) 1,7-bis(4-hydroxyphenyl)-1,6-heptadiene-3,5-dione.
2 more elements
Dependencies are inferred from the claim text.