Method and apparatus for processing a sample

A method for processing a sample with a processing arrangement, comprising the steps of:

• taking up a particle adhering on a sample surface of the sample with a measuring tip of the processing arrangement;
• supplying a process gas to a processing position on the sample or on a deposition unit;
• irradiating a particle beam onto the processing position to trigger a local chemical reaction for generating a microstructure at the processing position;
• and
• moving the measuring tip into an interaction region of the generated microstructure in which an interaction acts between the particle taken up by the measuring tip and the generated microstructure in order to transfer the particle from the measuring tip to the generated microstructure.

A method for processing a sample with a processing arrangement, comprising:

• taking up a particle adhering on a sample surface of the sample with a measuring tip of the processing arrangement;
• capturing an image of the particle taken up by the measuring tip;
• determining one or more properties of the particle taken up by the measuring tip depending on the captured image;
• selecting a microstructure from a plurality of different microstructures that are disposed in a microstructured surface section on the sample or on a deposition unit, depending on the properties determined;
• and
• moving the measuring tip into an interaction region of the selected microstructure in the microstructured surface section in which an interaction acts between the particle taken up by the measuring tip and the selected microstructure in order to transfer the particle from the measuring tip to the microstructured surface section.