Probe card holder for wafer testing

Abstract

Proposed is a probe card holder for wafer testing including a first body part (110) provided with a probe card (111) and through guide holes (112) vertically formed around the probe card (111), a second body part (120) provided with a wafer chuck (121) on which a wafer is seated and a magnet holder (122) corresponding to the guide hole (112), a weight ring (130) provided with a magnet chuck (131) that is inserted into the guide hole (112) and fixed with the magnet holder (122) by magnetic force, and assembled with the second body part (120) at a top of the first body part (110), and a clamping part (140) provided between the first body part (110) and the weight ring (130) to hold spacing between the first body part (110) and the weight ring (130).

Dependencies are inferred from the claim text.