Inspection system and method for inspecting light-emitting diodes

An inspection system, configured to inspect a plurality of light-emitting diodes, comprising:

• an excitation light source configured to provide an excitation beam to the plurality of light-emitting diodes so that the plurality of light-emitting diodes generate a plurality of open-circuit voltages;
• a voltage-sensing film located at a top side of the plurality of light-emitting diodes and configured to generate a display change according to a driving voltage, wherein the driving voltage is derived from at least the plurality of open-circuit voltages, and the voltage-sensing film comprises:
• a voltage-sensing medium layer;
• and
• a first electrode layer disposed in the voltage-sensing medium layer to provide a gain effect of the plurality of open-circuit voltages, so that the voltage-sensing medium layer senses the plurality of open-circuit voltages, wherein the first electrode layer comprises a plurality of strip electrodes arranged at intervals along an arrangement direction, and an external bias voltage is provided to the plurality of strip electrodes such that a voltage difference is formed between adjacent strip electrodes;
• an illumination light source providing an illumination beam to the voltage-sensing film to generate a sensing image according to the display change;
• and
• an image capture device disposed on a transmission path of the sensing image and configured to receive the sensing image to generate an inspection result,
• wherein an electric field corresponding to the plurality of open-circuit voltages has a direction parallel to an extending direction of a substrate with the plurality of light-emitting diodes.