Probe card device and tunnel-type probe thereof

A probe card device, comprising:

• a first guide plate unit;
• a second guide plate unit corresponding in position to and being spaced apart from the first guide plate unit along a thickness direction;
• a plurality of conductive probes assembled to the first guide plate unit and the second guide plate unit, wherein each of the conductive probes includes:
• a transmission segment having two end portions respectively arranged in the first guide plate unit and the second guide plate unit;
• a testing segment that extends from one of the two end portions of the transmission segment to protrude out of the first guide plate unit;
• and
• a transferring segment that extends from another one of the two end portions of the transmission segment to protrude out of the second guide plate unit;
• and
• a plurality of tunnel-type probes assembled to the first guide plate unit, wherein each of the tunnel-type probes includes:
• a tube inserted into and fixed in the first guide plate unit, wherein the tube has an operation channel, a first opening, and a second opening, and wherein the first opening and the second opening are respectively arranged on two opposite ends of the operation channel;
• an elastic member assembled to the tube and located in the operation channel;
• and
• a pin movably disposed through the operation channel, wherein the pin is connected to the elastic member so as to be electrically coupled to the tube, and the pin includes:
• an inner segment located in the operation channel and connected to the elastic member;
• a contacting segment connected to one end of the inner segment and located outside of the first opening;
• and
• a limiting segment connected to another end of the inner segment, wherein the limiting segment is located outside of the second opening and abuts against the tube;
• wherein, when the pin of each of the tunnel-type probes abuts against a device under test (DUT) through the contacting segment thereof, the pin is moved in a direction away from the DUT, so that a portion of the contacting segment is moved into the operation channel by passing through the first opening, a portion of the inner segment is moved out of the operation channel by passing through the second opening, the limiting segment is separated from the tube, and the elastic member is deformed from being pressed by the pin so as to generate an elastic force;
• wherein, in each of the tunnel-type probes, the limiting segment includes two limiting blocks being separate from each other, and the inner segment includes two branched arms that are disposed through the elastic member and that are respectively connected to the two limiting blocks.