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US 12,601,062 B2Granted
Multi-port gas injection system and reactor system including same
AssigneeASM IP Holding B.V.
InventorsMingyang Ma, Junwei Su, Alexandros Demos, Xing Lin, Sam Kim, Gregory Michael Bartlett
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Abstract
A gas injection system, a reactor system including the gas injection system, and methods of using the gas injection system and reactor system are disclosed. The gas injection system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas injection system coupled to a reaction chamber.
Claims14
A gas injection system, comprising:
- a first gas supply line;
- a second gas supply line;
- a first gas manifold coupled to the first gas supply line having a plurality of first gas outlets;
- a second gas manifold coupled to the second gas supply line having a plurality of second gas outlets;
- a plurality of mass flow sensors, wherein at least one of the plurality of mass flow sensors is coupled to each of the plurality of first gas outlets and the plurality of second gas outlets;
- a plurality of gas valves, wherein at least one of the plurality of gas valves is coupled to an outlet of each of the plurality of mass flow sensors;
- a plurality of first gas channels, wherein each of the plurality of first gas channels connects one of the plurality of first gas outlets to a flange, and wherein each of the plurality of first gas channels is coupled to one of a plurality flange gas channels disposed within the flange;
- a plurality of second gas channels, wherein each of the plurality of second gas channels connects one of the plurality of second gas outlets to the flange, and wherein each of the plurality of second gas channels is coupled to one of a plurality flange gas channels disposed within the flange;
- and
- a controller disposed in communication with the plurality of mass flow sensors and operatively connected to the plurality of gas valves, the controller responsive to instructions recorded on a non-transitory machine-readable memory to:
- receive a flow ratio setpoint for each of the plurality of first gas valves;
- receive a measurement of gas flow through each of the plurality of first gas valves;
- determine a flow ratio of gas through each of the plurality of first gas valves;
- compare the determined flow ratio to the received flow ratio set point for each of the plurality of first gas valves;
- and
- control gas flow through each of the first gas valves using the comparison of the received flow ratio setpoint to the determined flow ratio for each of the plurality of first gas valves,
- wherein a flow ratio of gas for a first gas valve is determined by dividing the measurement of gas flow through the first gas valve by a total flow rate, wherein the total flow rate is calculated by summing the measurements of gas flow through each of the plurality of first gas valves.
14 more elements
Dependencies are inferred from the claim text.