Robot, conveying system, and robot-controlling method

A conveying system comprising:

• a substrate conveyor including conveying space;
• and
• a robot arranged in the substrate conveyor, wherein
• the robot includes
• a base,
• a horizontal multi-joint robot arm connected to the base,
• a plurality of hands arranged in a distal end part of the robot arm and configured to hold a rectangular plate-shaped workpiece, wherein the hands include a first hand and a second hand arranged above the first hand and configured to operate independently of the first hand, and
• a controller configured to control operations of the hands and the robot arm so as to convey a plurality of the workpieces between a plurality of receiving parts, and wherein
• the hands and the robot arm are arranged in the conveying space surrounded by a plurality of walls,
• the controller is configured to control the operations of the hands so as to move, when one of the first hand and the second hand enters a first receiving part of the plurality of receiving parts as an entry hand, the other of the first hand and the second hand as a leaving hand away from the first receiving part, and
• the controller is configured to control the operations of the hands and the robot arm to convey the workpieces with a first distance between the center of each hand and a first end surface of each workpiece being different from a second distance between the center of each hand and a second end surface of each workpiece, by deviating each workpiece by a predetermined distance with respect to the center of the entry hand in a direction in which the leaving hand moves away from the first receiving part so as to prevent interference of the workpiece that is held by the leaving hand with a first wall of the plurality of walls, wherein the predetermined distance is set based on a third distance between an interior surface of the first wall of the conveying space and a part of each workpiece that interferes with the first wall in a case in which each workpiece is centered on each hand.

A method for controlling a robot including a base, a horizontal multi-joint robot arm connected to the base;

• a plurality of hands arranged in a distal end part of the robot arm and configured to hold a rectangular plate-shaped workpiece, the hands including a first hand and a second hand arranged above the first hand and configured to operate independently of the first hand, and the hands and the robot arm being arranged in a conveying space surrounded by a plurality of walls,
• the method comprising:
• controlling operations of the hands and the robot arm so as to convey a plurality of the workpieces between a plurality of receiving parts, wherein
• the controlling operations include:
• controlling the operations of the hands so as to move, when one of the first hand and the second hand enters a first receiving part of the plurality of receiving parts as an entry hand, the other of the first hand and the second hand as a leaving hand away from the first receiving part, and
• controlling the operations of the hands and the robot arm to convey the workpieces with a first distance between the center of each hand and a first end surface of each workpiece being different from a second distance between the center of each hand and a second end surface of each workpiece, by deviating each workpiece by a predetermined distance with respect to the center of the entry hand in a direction in which the leaving hand moves away from the first receiving part so as to prevent interference of the workpiece that is held by the leaving hand with a first wall of the plurality of walls, wherein the predetermined distance is set based on a third distance between an interior surface of the first wall of the conveying space and a part of each workpiece that interferes with the first wall in a case in which each workpiece is centered on each hand.