Method and apparatus for holding substrate
AssigneeORC Manufacturing Co., Ltd.
InventorsShuichi Shimizu, Fumiya Suzuki
Life of this patent
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Abstract
An apparatus for holding a substrate includes a table, a lifting and lowering mechanism configured to mount a substrate on the table, and at least one pressing member configured to press the substrate to the table from the peripheral side of the substrate, in which the pressing member is movable upward and downward. The apparatus further includes at least one detector configured to detect a warp of the substrate mounted on the table from a peripheral side of the substrate, and a controller configured to control a movement of the pressing member in accordance to the detected warp.
Claims5
An apparatus for holding a substrate, comprising:
- a table;
- a lifting and lowering mechanism configured to mount a substrate on said table;
- at least one pressing member configured to press the substrate toward said table from a peripheral side of the substrate, said pressing member being movable upward and downward;
- at least one detector configured to detect a warp of the substrate mounted on said table from the peripheral side of the substrate;
- and
- a controller configured to control a movement of said pressing member in accordance to the detected warp
- wherein, in a state in which the substrate is mounted on said table, said detector is further configured to ascend or descend.
An apparatus for holding a substrate, comprising:
- a table;
- a lifting and lowering mechanism configured to mount a substrate on said table;
- at least one pressing member configured to press the substrate toward said table from a peripheral side of the substrate, said pressing member being movable upward and downward;
- at least one detector configured to detect a warp of the substrate mounted on said table from the peripheral side of the substrate;
- and
- a controller configured to control a movement of said pressing member in accordance to the detected warp,
- wherein said detector is further configured to ascend or descend along with said pressing member, and said detector is further configured to detect the warp of the substrate as said lifting and lowering mechanism ascends upward.
Dependencies are inferred from the claim text.