Composite IC die package including an electro-thermo-mechanical die (ETMD) with through substrate vias
AssigneeIntel Corporation
InventorsDebendra Mallik, Omkar Karhade, Nitin Deshpande
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorsDebendra Mallik, Omkar Karhade, Nitin Deshpande
Estimating the term…
Multi-die composite packages including directly bonded IC die and at least one electro-thermo-mechanical die (ETMD). An ETMD is distinguished from an active IC die as an ETMD is a passive die lacking any semiconductor devices, such as transistors. In exemplary embodiments, an ETMD includes a substrate, which may be a crystalline semiconductor material, for example, and one or more through substrate vias (TSVs) passing through a thickness of the substrate. The TSVs may enable a ETMD to electrically interconnect an (active) IC die of a composite package to another IC die of the package or to a package host.
An integrated circuit (IC) die package comprising:
A system comprising:
Dependencies are inferred from the claim text.