Systems and methods for fabricating superconducting integrated circuits

A method of mitigating microwave crosstalk in a superconducting integrated circuit, the superconducting integrated circuit comprising a microwave sensitive component, the microwave sensitive component having a footprint and being formed in multiple interconnected layers of the superconducting integrated circuit, the method comprising:

• forming a microwave shielding base layer to at least partially shield the microwave sensitive component, the microwave shielding base layer having a footprint;
• forming one or more sides extending from the microwave shielding base layer to at least partially shield the microwave sensitive component, including forming at least one shielding layer through multiple layers of the superconducting integrated circuit to at least partially enclose the microwave sensitive component;
• and
• forming a dielectric material to surround the microwave sensitive component, the dielectric material disposed between the microwave shielding base layer and the microwave sensitive component and between the one or more sides and the microwave sensitive component, the dielectric material being a silicon compound;
• wherein the footprint of the microwave sensitive component is contained within the footprint of the microwave shielding base layer and the one or more sides extend around at least a portion of the microwave sensitive component, and the microwave shielding base layer and the one or more sides form at least a portion of a microwave shield.