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US 12,596,299 B2Granted
EUV transmissive membrane
AssigneeNGK Insulators, Ltd.
InventorsToshikatsu Kashiwaya, Naoki Goriki, Shoji Tange, Atsuo Kondo
Life of this patent
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Abstract
There is provided an EUV transmissive membrane including: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.
Claims13
An EUV transmissive membrane comprising:
- a main layer composed of metallic beryllium that has a first surface on one side of the main layer and a second surface on an opposite side of the main layer;
- and
- a first surface layer provided on the first surface of the main layer and a second surface layer provided on the second surface of the main layer, wherein each of the first surface layer and the second surface layer comprise at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.
Dependencies are inferred from the claim text.