Actuator, pump, method for manufacturing actuator
AssigneeMurata Manufacturing Co., Ltd.
InventorNobuhira Tanaka
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AssigneeMurata Manufacturing Co., Ltd.
InventorNobuhira Tanaka
Estimating the term…
An actuator includes a vibrating member, a frame, and an adhesive. The vibrating member includes a main surface and a main surface, and a piezoelectric element is mounted on the main surface. The vibrating member has a plate shape and includes an outer edge portion having a greater shape than the piezoelectric element in plan view and not abutting the piezoelectric element). The frame has an outer edge shape that is smaller than the vibrating member. The frame and the main surface in the outer edge portion of the vibrating member are adhered to each other with the adhesive. In plan view, the outer edge shape of the frame is smaller than an outer shape of the outer edge portion of the vibrating member. The frame includes a projection portion that projects outward from part of an outer edge.
An actuator comprising:
Dependencies are inferred from the claim text.