Heat treatment apparatus
AssigneeTokyo Electron Limited
InventorYoshitaka Miura
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AssigneeTokyo Electron Limited
InventorYoshitaka Miura
Estimating the term…
A heat treatment apparatus includes: a processing container having a roof in a cylindrical shape and a lower end opening, and in which a first space is formed; a lid for closing the lower end opening; a support including a shaft portion and a placement portion; a boat installed on the placement portion to vertically hold substrates; a partitioning member provided around the shaft portion with a gap left from a lower surface of the placement portion to form a second space partitioned from the first space; and a heat insulating material provided in the second space. An exhaust port is provided in a sidewall of the processing container. In a circumferential direction of the processing container, the gap includes a first gap having at least an angular position where the exhaust port is provided, and a second gap provided at an angular position excluding the first gap.
A heat treatment apparatus, comprising:
Dependencies are inferred from the claim text.