MEMS device

A microelectromechanical systems (MEMS) device, comprising:

• a first deflectable membrane structure having a deflectable portion;
• a second deflectable membrane structure having a deflectable portion;
• and
• a rigid electrode structure disposed between the first and second deflectable membrane structures;
• and
• mechanical connection elements that mechanically couple the deflectable portions of the first and second deflectable membrane structures to each other, wherein the deflectable portions of the first and second deflectable membrane structures are mechanically decoupled from the rigid electrode structure,
• wherein at least a subset of the mechanical connection elements are elongated mechanical connection elements, wherein the elongated mechanical connection elements have a lateral cross-sectional area with a laterally elongated dimension along a direction which is within a tolerance range of +/−20° perpendicular to a local membrane deflection gradient of the first and second deflectable membrane structures at a lateral position of the respective elongated mechanical connection element, and
• wherein the MEMS device is a MEMS sound transducer with a microphone or loudspeaker functionality.

A microelectromechanical systems (MEMS) device comprising:

• a first deflectable membrane structure having a deflectable portion;
• a second deflectable membrane structure having a deflectable portion;
• and
• a rigid electrode structure disposed between the first and second deflectable membrane structures;
• and
• mechanical connection elements that mechanically couple the deflectable portions of the first and second deflectable membrane structures to each other, wherein the deflectable portions of the first and second deflectable membrane structures are mechanically decoupled from the rigid electrode structure,
• wherein a first subset of the mechanical connection elements are elongated mechanical connection elements, wherein the elongated mechanical connection elements have a lateral cross-sectional area with a laterally elongated dimension along a direction which is within a tolerance range of +/−20° perpendicular to a local membrane deflection gradient of the first and second deflectable membrane structures at a lateral position of the respective elongated mechanical connection element, and
• wherein a second subset of the mechanical connection elements are circular mechanical connection elements having a lateral cross-sectional area with a circular shape.