Method of manufacturing liquid discharging head, method of manufacturing nozzle substrate, and liquid discharging head
AssigneeSeiko Epson Corporation
InventorsShinichi Yotsuya, Masahiro Fujii, Koji Kitahara
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AssigneeSeiko Epson Corporation
InventorsShinichi Yotsuya, Masahiro Fujii, Koji Kitahara
Estimating the term…
A method of manufacturing a liquid discharging head includes a pressure chamber substrate that includes a pressure chamber and a nozzle substrate that includes a nozzle communicating with the pressure chamber and is formed of a semiconductor substrate, the method including a first step in which, in a state where a metal film is formed on the nozzle substrate in a first portion corresponding to the nozzle of a first surface which is a surface of the nozzle substrate on a pressure chamber substrate side, and the metal film is not formed on the nozzle substrate in a second portion not corresponding to the nozzle of the first surface, the nozzle is formed by carrying out metal assist chemical etching.
A method of manufacturing a liquid discharging head including a pressure chamber substrate that includes a pressure chamber and a nozzle substrate that includes a nozzle communicating with the pressure chamber and is formed of a semiconductor substrate,
A method of manufacturing a nozzle substrate including a nozzle and formed of a semiconductor substrate, the method comprising:
Dependencies are inferred from the claim text.