Amorphous phase modification apparatus and processing method of single crystal material

An amorphous phase modification apparatus, used for forming an amorphous phase modified layer, wherein the amorphous phase modification apparatus comprises:

• a femtosecond laser source, used for emitting a laser beam;
• a speckle adjuster, used for adjusting a speckle size of the laser beam emitted by the femtosecond laser source;
• a beam angle scanner, used for adjusting an angle of the laser beam received from the speckle adjuster, and the beam angle scanner performs a small angle scanning at a motion frequency of 100 Hz to 10,000 Hz;
• focusing objective lens, used for receiving the laser beam passing through the beam angle scanner, and for focusing the laser beam;
• and
• a motion module, used for carrying an object to be modified, and allowing the object to be modified to receive the laser beam passing through the focusing objective lens,
• wherein the beam angle scanner is a resonant scanner, a piezoelectric material driven lens or an acoustic optic modulator.